The EBT Series are mechanical bearing compound turbomolecular pumps which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series are highly efficient, cost effective solutions to your high vacuum pumping requirements. EBARA’s EBT Series compound turbomolecular pumps offer an extremely rugged mechanical bearing design which provides clean, reliable vacuum generation for today’s high tech manufacturing. Typical applications include semiconductor, thin film, photovoltaic and analytical instruments. EBARA’s EBT Series compound turbomolecular pumps can be mounted in any orientation. This EBT Series offer high pumping speed and high light gas compression, making them ideal for UHV and analytical systems.
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